PURPOSE: To provide a pressure sensor with excellent pressure detection accuracy in the pressure sensor using a strain sensitive resistor.
CONSTITUTION: A pressure sensor is equipped with a base body 10 which is made into the shape of a circular diaphragm whose rim portion 11 is held and deforms under a pressure to be measured, a strain sensitive resistor R10 which is arranged at a portion except the rim portion 11 of the base body 10, and a pair of electrodes D10 which face mutually and are arranged on the base body 10 so as to touch the strain sensitive resistor R10. On an opposite face to a face on which the strain sensitive resistor R10 and the electrodes D10 are arranged, a narrower slot-like recessed portion 14 than the distance between the electrodes D10 is formed between the electrodes D10 so as to cross the strain sensitive resistor R10.
OGINO TSUYOSHI
KAKITA KENICHI
SUGIOKA ICHIRO
