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Title:
PROBE CARD STRUCTURE SIMULTANEOUSLY ADAPTABLE TO DIFFERENT TEST APPARATUS OF DIFFERENT SPECIFICATION
Document Type and Number:
Japanese Patent JP2012053030
Kind Code:
A
Abstract:

To provide a probe card structure simultaneously adaptable to different test apparatuses of different specifications which is designed to have a single probe card structure simultaneously adaptable to different IC test apparatuses.

A probe card structure simultaneously adaptable to different test apparatuses of different specifications includes a specification conversion interface unit 5 disposed on a probe card of a first specification, by which the probe card without the specification conversion interface unit 5 can be mounted on an originally adapted test apparatus of the first specification to carry out a test process. Moreover, a reinforcement member 4 of a second specification is associated with the specification conversion interface unit 5, and the probe card is mounted on a test apparatus of the second specification. Accordingly, the probe card of a single specification can be simultaneously applied to different test apparatuses of different specifications. The adaptation to different specifications of test apparatuses makes it possible to significantly save cost and time for repeatedly manufacturing different specifications of probe cards.


Inventors:
HONG KOEN-YO
JIN CHI-YO
Application Number:
JP2011128198A
Publication Date:
March 15, 2012
Filing Date:
June 08, 2011
Export Citation:
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Assignee:
HERMES TESTING SYSTEMS INC
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
JP2000349128A2000-12-15
JP2007155507A2007-06-21
JPH0221268A1990-01-24
JP2008014730A2008-01-24
JP2008014730A2008-01-24
JPH1145917A1999-02-16
JP2007155507A2007-06-21
JP2005136302A2005-05-26
JPH08201429A1996-08-09
JPH0221268A1990-01-24
JP2000349128A2000-12-15
Foreign References:
US6078186A2000-06-20
US20020024354A12002-02-28
Attorney, Agent or Firm:
Sakuo Yamaguchi