Title:
PROBE METHOD AND PROBE DEVICE THEREOF
Document Type and Number:
Japanese Patent JP3294170
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the reliability on inspection by preventing the dislocation of a probe terminal or the abnormality of probe pressure due to the cooling of a probe card.
SOLUTION: When a main chuck 20 retreats to a position lower than the position of inspection during inspection at a high temperature, the main chuck 20 is detected via a position detection sensor, and then the retreat time of the main chuck 20 is computed through a retreat time computation means. Based on this computed value, it is determined as to whether or not a probe card should be preheated with the main chuck 20 via a preheat execution determining means, and when it is determined that the probe card is to be preheated, preheat execution time is found, based on the retreat time and the kind of the probe card, via a preheat time computation means. Next, the main chuck 20 is stopped in the inspection position for only the preheat execution time via a preheat finish determining means.
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Inventors:
Shigeaki Takahashi
Yukihiko Fukasawa
Yukihiko Fukasawa
Application Number:
JP30483397A
Publication Date:
June 24, 2002
Filing Date:
October 20, 1997
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/66; G01R31/28; (IPC1-7): H01L21/66; G01R31/28
Domestic Patent References:
| JP5235129A | ||||
| JP6275481U |
Attorney, Agent or Firm:
Hajime Obara
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