To solve such a problem that a probe is required to be manufactured using a photo-mask conforming to each array pattern in the probe in every time when preparing a different kind of a probe card, and a problem that the plurality of photo-masks is required because the probe is constituted of a plurality of members such as a contact and a lead part for manufacture of the one kind of probe card and because the respective constitutive members have different shapes.

This probe manufacturing method of the present invention is provided with a process for forming shapes 10A corresponding to the contacts 4A at a prescribed array pattern in a plurality of portions in a silicon substrate 10, a process for forming a copper-plated layer removably on the silicon substrate 10, a process for forming the plurality of probes 4 integrated with the contact 4A and a beam part 4B at the prescribed array pattern, and a process for transferring the plurality of probes 4 removably to the first adhesive resin film 11.