To provide a process for producing a nanoparticle which is a technique in response to mass production, that is, a ratio (recovery ratio) capable of recovering as the nanoparticle from an introduced nanoparticle raw material is 30% class or larger and also uniformity of a particle diameter is high in a production field of the nanoparticle of metal, oxide and others having a particle diameter of 100 nm class or smaller, and its production apparatus.

In the apparatus and the method for evaporating a raw material of the nanoparticle, stacking an evaporated substance and then collecting the nanoparticle, a stack device is constituted of a pipe material and also an evaporation device has a structure surrounded by the stack device. Further, the temperature of the pipe material is controlled by a coolant inserted in the inside so as to absorb most of thermal energy emitted from the evaporation device.