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Patent Searching and Data


Title:
PROCESS FOR PRODUCTION OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS5240970
Kind Code:
A
Abstract:
PURPOSE:To smooth the overhangs produced at the time of etching to a milder angle through thermal deformation by the use of a Ge3N4 film on a second insulating film, thereby preventing disconnection of electrode wiring.

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Inventors:
TANIGAWA EIKI
Application Number:
JP11679475A
Publication Date:
March 30, 1977
Filing Date:
September 26, 1975
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L21/768; H01L21/28; H01L21/306; (IPC1-7): H01L21/28; H01L21/306; H01L21/88



 
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