Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2022177740
Kind Code:
A
Abstract:
To provide a processing device that continuously monitors an inclination of a processing device and can reduce impact on processing quality.SOLUTION: A processing device 1 includes: a holding table 10 for holding an object to be processed 100; a processing unit 20 for processing the object to be processed 100 that is held to the holding table 10; and a control unit 70. The processing device 1 includes an inclination sensor 40 installed in any position of the processing device 1 and detecting an inclination of the processing device 1. The control unit 70 includes: a recording unit 71 for recording an inclination value that is detected by the inclination sensor 40; and a notification unit 72, when the inclination value exceeds a threshold, notifying a user of that.SELECTED DRAWING: Figure 1
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Inventors:
WADA MASAHIRO
INOUE ATSUSHI
INOUE ATSUSHI
Application Number:
JP2021084191A
Publication Date:
December 01, 2022
Filing Date:
May 18, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23Q17/00; B23Q1/00
Attorney, Agent or Firm:
Sakai International Patent Office
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