To provide a processing machine with a cleaning device that can securely remove dust etc., sticking on a hold surface of a chuck table holding a workpiece.
The cleaning device includes a roller support frame 21 supported movably at right angles to the hold surface of the chuck table, a first adhesive roller 22 supported rotatably on the roller support frame, a second adhesive roller 23 disposed in contact with the first adhesive roller, supported rotatably on the roller support frame, and having larger pressure-sensitive strength than the first adhesive roller, a moving/retracting means 24 of moving the roller support frame between the operation position where the adhesive roller comes into contact with the hold surface of the chuck table and the retraction position where the first adhesive roller leaves the hold surface, and a moving means 25 of moving the roller support frame in parallel to the hold surface of the chuck table. Dust on the chuck table sticks on an outer peripheral surface of the first adhesive roller and the dust sticking on the first adhesive roller is transferred to stick on an outer peripheral surface of the second adhesive roller.
OGOSE NOBUMORI
SANPEI TAKASHI
OMIYA NAOKI
| JPS6334929A | 1988-02-15 | |||
| JP2004221105A | 2004-08-05 | |||
| JP2002126672A | 2002-05-08 | |||
| JP2004273636A | 2004-09-30 | |||
| JP2006075659A | 2006-03-23 |
Sachiko Okunuki
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