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Title:
PROCESSING SYSTEM AND PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2003077978
Kind Code:
A
Abstract:

To provide a processing system and processing method capable of processing a workpiece without producing waiting of the workpiece in a processing device.

In the processing system 100 for performing serial processing processed continuously by either of second processing devices CL1 and CL2 in a plurality of the workpieces W after processing is performed by either of first processing devices TF1, TF2 and TF3, a control mechanism 20 has the n second processing devices, second processing is finished from a time point when workpieces W1 before n workpieces W3 intended to the carried to the first processing devices are finished by the first processing devices, in the case that a time until a carrying mechanism 10 carried from the second processing devices is vacant is X, X is previously determined, and carrying to the first processing devices of the workpieces W3 is allowed after X elapse after carrying for carrying the workpieces W1 in the first processing devices.


Inventors:
MURAOKA SUNAO
Application Number:
JP2001269211A
Publication Date:
March 14, 2003
Filing Date:
September 05, 2001
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/677; H01L21/02; H01L21/205; H01L21/68; (IPC1-7): H01L21/68; H01L21/02; H01L21/205
Domestic Patent References:
JPH11102953A1999-04-13
JPH10335412A1998-12-18
JPH09283589A1997-10-31
Attorney, Agent or Firm:
Hiroshi Takayama