To safely and surely carry a substrate by supporting it in the state that support load at all support positions is substantially uniform.

Six support positions 104 and 105 are previously set on the rectangular substrate 101 of lengths of a short side of V and a long side of H. The four outside support positions 104 are more inside by only p×V than the end of the long side, are more inside by only q×H than the end of the short side, the two inside support positions 105 are more inside by only p×V than the end of the long side and are more inside by only r×H than the end of the short side. Then, p=0.226, q=0.144, and r=0.500. Support members of a substrate carrying hand are abutted at the six support positions 104 and 105, respectively, to support the substrate 101.