Title:
PRODUCTION OF COMPOSITE THIN FILM OF POLYMER
Document Type and Number:
Japanese Patent JPH05112658
Kind Code:
A
Abstract:
PURPOSE:To obtain a composite thin film of a polymer containing ultra-fine particles of a metal or an inorganic substance in a state uniformly dispersed in the thin film and useful for electrical and electronic material, etc., by depositing a polymeric substance on a substrate under heating in vacuum and, at the same time, heating and depositing a metal or an inorganic substance on the substrate. CONSTITUTION:A polymeric substance (e.g. polyethylene) and a metal or an inorganic substance (e.g. aluminum powder) are used as raw materials and simultaneously heated and evaporated in a vacuum deposition apparatus by resistance heating at a vacuum degree of 1X10<-5>Torr at 320 deg.C for the polymeric substance and 1170 deg.C for the metal or the inorganic substance to deposit a thin film having a thickness of 30nm on a substrate such as glass. The objective composite thin film of polymer obtained by the above method contains the metal or the inorganic substance in the polymer thin film in the form of ultra-fine particles or in an atomic state and has an electrical conductivity comparable to metal in contrast to the starting polymeric substance free from electrical condctivity.
Inventors:
ORIHARA KATSUO
SHIMOMURA MASAHITO
TSURUMAKI SHIGERU
SHIMOMURA MASAHITO
TSURUMAKI SHIGERU
Application Number:
JP27266591A
Publication Date:
May 07, 1993
Filing Date:
October 21, 1991
Export Citation:
Assignee:
ORIHARA KATSUO
MITSUBISHI HEAVY IND LTD
MITSUBISHI HEAVY IND LTD
International Classes:
C08J5/18; C23C14/06; C23C14/24; (IPC1-7): C08J5/18; C23C14/06; C23C14/24
Attorney, Agent or Firm:
Akira Uchida (2 outside)