Title:
PRODUCTION OF DIAMOND FILM
Document Type and Number:
Japanese Patent JP3718822
Kind Code:
B2
Abstract:
PURPOSE: To selectively and rapidly separate gaseous hydrogen in waste gas with high purity and to reutilize the hydrogen when a diamond film is produced by a vapor phase reaction of a gaseous carbon source contg. gaseous hydrogen.
CONSTITUTION: A gaseous carbon source contg. gaseous hydrogen is fed into a vacuum reactor and a diamond film is produced by a vapor phase reaction. Waste gas contg. gaseous hydrogen discharged in the producing stage is brought into contact with a Pd or Pd alloy film at a high temp. and gaseous hydrogen passed through the film is reutilized in the production of a diamond film.
Inventors:
Kazuto Onjuku
Akio Hiraki
Akimitsu Hatta
Akio Hiraki
Akimitsu Hatta
Application Number:
JP7809495A
Publication Date:
November 24, 2005
Filing Date:
March 08, 1995
Export Citation:
Assignee:
GUNZE LIMITED
Akio Hiraki
Akimitsu Hatta
Akio Hiraki
Akimitsu Hatta
International Classes:
B01D53/22; B01D71/02; C30B25/14; C30B29/04; (IPC1-7): C30B25/14; B01D53/22; B01D71/02; C30B29/04
Domestic Patent References:
| JP63140618U | ||||
| JP6247792A | ||||
| JP5137979A |
Attorney, Agent or Firm:
Eiji Saegusa
Kakehi Yuro
Takeshi Ohara
Hiroji Nakagawa
Yasumitsu Tate
Kakehi Yuro
Takeshi Ohara
Hiroji Nakagawa
Yasumitsu Tate