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Title:
PRODUCTION METHOD OF GAS BARRIER FILM, METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE ELEMENT, AND ORGANIC ELECTROLUMINESCENCE ELEMENT
Document Type and Number:
Japanese Patent JP2015003439
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a production method of a gas barrier film in which light distribution property can be improved.SOLUTION: A gas barrier film 10 is produced through steps of: forming a deposition layer comprising silicon and nitrogen by a dry process on a substrate 11; and forming a silicon-containing layer 12 including a modified region 13 by irradiating the deposition layer with light at a wavelength of 150 nm or shorter while applying a tension of 30 N/m or more and 200 N/m or less to the substrate.

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Inventors:
I HIROMOTO
Application Number:
JP2013129824A
Publication Date:
January 08, 2015
Filing Date:
June 20, 2013
Export Citation:
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Assignee:
KONICA MINOLTA INC
International Classes:
B32B9/00; H01L51/50; H05B33/02; H05B33/10
Domestic Patent References:
JP2011184738A2011-09-22
JP2012149278A2012-08-09
JP2012131194A2012-07-12
JP2013082075A2013-05-09
JP2012246552A2012-12-13
JP2007302958A2007-11-22
Foreign References:
WO2012090644A12012-07-05
WO2013077255A12013-05-30
WO2013002026A12013-01-03
Attorney, Agent or Firm:
Patent business corporation Nobutomo international patent firm



 
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