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Patent Searching and Data


Title:
PRODUCTION METHOD OF PROTECTIVE FILM
Document Type and Number:
Japanese Patent JP2014074787
Kind Code:
A
Abstract:

To provide a method for producing a protective film having a superior flattening degree on a rugged substrate.

The method for producing a protective film includes the steps of: applying a photosensitive resin composition comprising a polymer (A), a (meth)acryl compound (B), a polymerization initiator (C) and a solvent (E) on a rugged substrate to form a coating film; exposing the coating film formed in a recessed portion to light through a mask; and exposing the entire surface of the coating film to light. The step of exposing the entire surface of the coating film is carried out subsequently to the step of exposing the coating film formed in a recessed portion to light through a mask.


Inventors:
SHIRAKAWA MASAKAZU
Application Number:
JP2012221924A
Publication Date:
April 24, 2014
Filing Date:
October 04, 2012
Export Citation:
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Assignee:
SUMITOMO CHEMICAL CO
International Classes:
G02B5/20; C08G59/20; G02F1/1335; G03F7/038; G03F7/38; H01L21/027
Domestic Patent References:
JP2007163945A2007-06-28
JP2000298272A2000-10-24
JP2003163150A2003-06-06
JP2010152336A2010-07-08
JP2010014937A2010-01-21
JP2007071949A2007-03-22
JPH0527110A1993-02-05
JPH06163355A1994-06-10
JPS4890739A1973-11-27
JP2009294498A2009-12-17
JP2010031091A2010-02-12
JP2012073604A2012-04-12
JP2010250120A2010-11-04
JP2014026136A2014-02-06
Foreign References:
US6414733B12002-07-02
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto