Title:
PRODUCTION METHOD OF SEMICONDUCTOR PRESSURE COERTER
Document Type and Number:
Japanese Patent JPS5212591
Kind Code:
A
Abstract:
PURPOSE: The production method of a semiconductor pressure converter with large adhesion strength without vacuum leaking by removing adhesion fault between a silicon pressure sensitizing element and a silicone mount.
Inventors:
MATSUSHITA YASUO
NAKAMURA KOUSUKE
NAKAMURA KOUSUKE
Application Number:
JP8826875A
Publication Date:
January 31, 1977
Filing Date:
July 21, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L29/84; (IPC1-7): H01L29/84