Title:
PRODUCTION OF ORGANIC PYROELECTRIC AND PIEZOELECTRIC BODY AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3406347
Kind Code:
B2
Abstract:
PURPOSE: To simultaneously produce an org. pyroelectric and piezoelectric body excellent in heat resistance and insulating property by forming a large-area polyurea film on a substrate in uniform thicknesss and quality with this device.
CONSTITUTION: A positive bias voltage is impressed on a substrate 3, the substrate 3 is irradiated with an electron, monomers of a polyurea are vaporized in vacuum, a polyurea film being deposited and polymerized on the substrate 3 is polarized, and an org. pyroelectric and piezoelectric body is produced.
Inventors:
Masayuki Iijima
Application Number:
JP14782593A
Publication Date:
May 12, 2003
Filing Date:
June 18, 1993
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C08J5/18; C23C14/12; H01L37/02; H01L41/45; (IPC1-7): C23C14/12; H01L37/02; H01L41/26
Domestic Patent References:
| JP2284485A | ||||
| JP348470A |
Attorney, Agent or Firm:
Kinichi Kitamura (2 others)
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