Title:
PRODUCTION OF QUARTZ GLASS
Document Type and Number:
Japanese Patent JPS63100025
Kind Code:
A
Abstract:
PURPOSE: To mass-produce a quartz glass having excellent optical property by heating a dry gel obtained from an alkyl-silicate as raw material.
CONSTITUTION: The dry gel, which is produced from the alkyl-silicate as the raw material by the sol-gel method, is allowed to desorb the physically adsorbed water by heating in atmosphere at ≥300°C and at the same time a residual carbon compd. is removed in the form of CO2. Next, the dry gel is set in a vacuum furnace, and is vetrified by heating at 700W1,450°C in decompression atmosphere, and then is heated and maintained at 1,500W2,200°C for a specified time. Thereby the inclusion or flaw is eliminated and the quartz glass having optically high purity is obtained.
Inventors:
MIYASHITA SATORU
Application Number:
JP24464086A
Publication Date:
May 02, 1988
Filing Date:
October 15, 1986
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
C01B33/158; C03B8/02; C03B19/12; (IPC1-7): C01B33/158; C03B8/02; C03B20/00
Attorney, Agent or Firm:
Kisaburo Suzuki (1 outside)