Title:
PRODUCTION OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS5376665
Kind Code:
A
Abstract:
PURPOSE:To cause turbulence and improve step covering by applying an electric field or magnetic field in the process of movement of ionized vapor deposited substance.
Inventors:
ABIRU AKIRA
SHIRAI KAZUNARI
SHIRAI KAZUNARI
Application Number:
JP15261076A
Publication Date:
July 07, 1978
Filing Date:
December 17, 1976
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C23C14/32; H01L21/20; H01L21/203; H01L21/283; H01L21/285; (IPC1-7): C23C13/00; H01L21/20; H01L21/283