Title:
PRODUCTION SYSTEM
Document Type and Number:
Japanese Patent JP2016031573
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a production system for processing the object to be processed and producing multiple kinds of products, with which system it is possible to perform change work easily when, for example, a new kind of product is produced.SOLUTION: In a production system 1, a plurality of host recipe numbers are stored in a host computer 8, a plurality of device recipes that are processing conditions for each of processing devices 4-7 for an object 2 to be processed are stored, for each of the processing devices 4-7, in association with the device recipe numbers for identifying the plurality of device recipes, and a correspondence table, in which the device recipe numbers for each of the processing devices 4-7 corresponding to each of the plurality of host recipe numbers are defined, is stored in a relay computer 9. The processing devices 4-7 transmit the host recipe number to the relay computer 9, receive the device recipe number corresponding to the host recipe number from the relay computer 9, and perform processing on the object 2 to be processed using the device recipe corresponding to the received device recipe number.SELECTED DRAWING: Figure 1
Inventors:
KURATA SHIGERU
Application Number:
JP2014152602A
Publication Date:
March 07, 2016
Filing Date:
July 28, 2014
Export Citation:
Assignee:
NIDEC SANKYO CORP
International Classes:
G05B19/418; H01L21/02
Domestic Patent References:
| JP2005317622A | 2005-11-10 | |||
| JP2000195769A | 2000-07-14 | |||
| JPH05151231A | 1993-06-18 | |||
| JP2011090630A | 2011-05-06 | |||
| JP2004145792A | 2004-05-20 | |||
| JP2003197496A | 2003-07-11 | |||
| JP2003100586A | 2003-04-04 |
Attorney, Agent or Firm:
Shin Kodaira
Shiro Yokozawa
Toru Kawai
Kawaguchi Nobuko
Shiro Yokozawa
Toru Kawai
Kawaguchi Nobuko