PURPOSE: To synthesize a superconducting thin film having a high critical temp. at a low temp. irradiating a substrate with UV rays when a Y-Ba-Cu-O type oxide having a specified compsn. is vacuum-deposited on the substrate to form a thin film.
CONSTITUTION: When an oxide having a compsn. represented by a formula YaBabCu1-a-bOx (where a is 0.15-0.2, b is 0.3-0.35 and x is 0.95-1.05) is vacuum- deposited on a substrate in a vacuum vessel to form a thin film, the substrate is irradiated with UV rays and high frequency plasma is introduced into the vacuum vessel. By the irradiation, the dissociation of O2 molecules is accelerated to accelerate the oxidation reaction of each component on the surface of a thin film during film formation. By introducing high frequency plasma, evaporated atoms are activated and allowed to acceleratedly react with oxygen, the temp. of the substrate during film formation can be reduced and the crystallinity of the superconducting phase is enhanced. The resulting thin film has a critical temp. (Tc) higher than the b.p. of liq. nitrogen.
SATO TETSURO
FUJITA JUNICHI
MIURA SADAHIKO
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