To provide an electrostatic type MEMS actuator having a program function.
The programmable actuator includes a movable part 1 having a first drive electrode 3A; a second drive electrode 3B opposite to the first drive electrode 3A and having first and second parts 5a, 5b; a first drive circuit 6a for allowing the movable part 1 to operate a plurality of times, in a state where both the electrodes are not in electrical contact with each other, by generating a first potential difference between the first part 5a of the second drive electrode 3B and the first drive electrode 3A; and a second drive circuit 6b for fixing the movable part 1, in a state where both the electrodes are in electrical contact with each other, by generating a second potential difference between a second part 5b of the second drive electrode 3B and the first drive electrode 3A.
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tetsuya Kazama
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen
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