Title:
PROJECTING OPTICAL INSTRUMENT
Document Type and Number:
Japanese Patent JPS6119129
Kind Code:
A
Abstract:
PURPOSE:To detect any fluctuation in optional characteristics easily by a method wherein a temperature detecting means is arranged on the position under optical energy from a light source on an optical path of an illuminating optical system. CONSTITUTION:A temperature sensor 30 is arranged on the backside of a dichroic mirror to detect any fluctuation in optical characteristics of a projecting lens 13. The sensor 30 mainly irradiated with light of wavelength excluding exposing light among optical energy emitted from a light source 1 raises the temperature thereof logarithmically in proportion to the lapse of irradiation time to output detecting signal S1 corresponding to the temperature. The signals S1 is inputted to a detecting circuit 32 to detect any fluctuation in image. The circuit 32 computes the fluctuation in image by means of specified processing to input any computed fluctuation data S4 to a main control circuit 40. The circuit 40 outputs driving signals to a motor 16 so that the level of wafer holder 14 may be corrected corresponding to the fluctuation as well as offset signals S5 to a projector 17 of an out of focus detecting system so that the surface position of a wafer to be detected may be corrected.
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Inventors:
TANAKA HIROSHI
Application Number:
JP13953684A
Publication Date:
January 28, 1986
Filing Date:
July 05, 1984
Export Citation:
Assignee:
NIPPON KOGAKU KK
International Classes:
H01L21/30; G03F7/20; G03F7/207; H01L21/027; (IPC1-7): G03F7/20; H01L21/30
Attorney, Agent or Firm:
Takao Watanabe