Title:
ポンプ装置
Document Type and Number:
Japanese Patent JP5892559
Kind Code:
B2
Abstract:
[Object] To provide a pump device capable of stabilizing a suction flow rate irrespective of an outside air temperature and a control method therefor. [Solving Means] The control method for a pump device includes: outputting a drive signal for driving a motor at a rotation speed for discharging gas of the reference flow rate from the suction port of the pump main body; measuring a temperature of gas discharged from the suction port or a temperature of the pump main body by a temperature sensor attached to the pump main body; calculating an actual flow rate of the gas discharged from the suction port based on a temperature signal relating to the temperature of the gas included in an output of the temperature sensor; and correcting the drive signal such that the actual flow rate equals the reference flow rate and outputting the corrected drive signal to the motor.
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Inventors:
Yuji Nonomura
Suzuki Sachie
Ryuji Itoyama
Akihiro Yamanaka
Suzuki Sachie
Ryuji Itoyama
Akihiro Yamanaka
Application Number:
JP2013558580A
Publication Date:
March 23, 2016
Filing Date:
February 16, 2012
Export Citation:
Assignee:
ULVAC Kiko Co., Ltd.
International Classes:
F04B49/06; F04B45/04
Domestic Patent References:
| JP2012117435A | ||||
| JP2003021071A | ||||
| JP2003248516A |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Ori Akira