Title:
PYROELECTRIC INFRARED DETECTING ELEMENT
Document Type and Number:
Japanese Patent JP3637665
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide the highly reliable infrared detecting element, which has the small heat capacity, excellent thermal response and high detecting sensitivity and thermal time constant, and can achieve the integration and compact configuration, in a pyroelectric infrared detecting element for detecting infrared rays by using a pyroelectric body.
SOLUTION: This element has a substrate 11, an infrared detecting part, which has a first electrode 12a on the substrate 11, has a pyroelectric thin film 14 on the first electrode 12a and has a second electrode 15a on the pyroelectric thin film 14, and a cavity 18 at the surface layer part of the substrate 11 in contact with the above described infrared detecting part. The above described infrared detecting part is supported through a holding body 17, wherein holes are provided in the region of at least 50% or more. Furthermore, drawing parts 12b and 15b of the respective electrodes have the length twice or more of the distances between the above described infrared detecting part and between the above described infrared detecting part and an external connecting terminal 13, and the drawing parts are constituted by using the material, whose thermal conductivity is smaller than that of the first electrode 12a.
Inventors:
Tsutomu Nakanishi
Kazushi Morisugi
Fumio Hosomi
Otani Tokumi
Koji Nomura
Kazushi Morisugi
Fumio Hosomi
Otani Tokumi
Koji Nomura
Application Number:
JP890296A
Publication Date:
April 13, 2005
Filing Date:
January 23, 1996
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G01J1/02; G01J5/02; G01J5/34; (IPC1-7): G01J5/34; G01J1/02
Domestic Patent References:
| JP5055577A | ||||
| JP7508095A | ||||
| JP7198474A |
Attorney, Agent or Firm:
Fumio Iwahashi
Tomoyasu Sakaguchi
Hiroki Naito
Tomoyasu Sakaguchi
Hiroki Naito