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Title:
PYROELECTRIC PHOTODETECTOR AND ELECTRONIC EQUIPMENT
Document Type and Number:
Japanese Patent JP2012026860
Kind Code:
A
Abstract:

To improve the detecting efficiency of a pyroelectric photodetector.

A pyroelectric photodetector 200 includes: a lower electrode 234; a pyroelectric material layer 232 formed on the lower electrode; and an upper electrode 236 formed on the pyroelectric material layer. The upper electrode 234 is configured of a single material layer or laminated multiple material layers, and at least the uppermost layer of the single material layer or laminated multiple material layers is also configured as a light absorption layer. The upper electrode 236 can be formed in an area coating the whole area of the pyroelectric material layer when it is flatly viewed. Also, at least the uppermost layer of the single material layer or laminated multiple material layers is also configured as a reduction gas barrier layer with respect to reduction gas for reducing the pyroelectric materials 232. The reduction gas barrier layer can be formed on the side face of the pyroelectric material layer 232.


Inventors:
KITAHARA YUKIO
Application Number:
JP2010165595A
Publication Date:
February 09, 2012
Filing Date:
July 23, 2010
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G01J1/02; H01L37/02; G01J5/34; G01J5/48
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka