Title:
四重極型質量分析計とそれを有する真空装置
Document Type and Number:
Japanese Patent JP4199050
Kind Code:
B2
Abstract:
To provide a quadrupole type mass spectrometer carrying out measuring of pressure.
A pressure detecting part 40 for a pressure measuring device is installed inside a container 11 in which a quadrupole 23 is installed and the quadrupole 23 and a pressure detecting part 40 are partitioned by shielding plates 131and 132. When mass spectrometry is carried out by energizing a filament 22 and applying voltage to the quadrupole 23, electrons, light or heat radiation discharged from the filament 22 are shielded by the shielding plates 131and 132, not reaching the pressure detecting part 40 so that accurate pressure measuring is carried out. Vents 151and 152are provided in the shielding plates 131and 132, and the space between the shielding plates 131and 132and a bottom surface of the container 11 is evacuated.
COPYRIGHT: (C)2005,JPO&NCIPI
Inventors:
Nozomi Takagi
Kazuhiko Noboru
Ning Nagata
Munetaka Tada
Kawasaki Noriaki
Toyoaki Nakajima
Application Number:
JP2003144541A
Publication Date:
December 17, 2008
Filing Date:
May 22, 2003
International Classes:
G01L21/12; H01J49/42; C23C14/54; C23C16/52; G01N27/62; H01J41/02; H01J49/24
Domestic Patent References:
| JP1287264A | | | | |
| JP1311554A | | | | |
| JP5217549A | | | | |
| JP7272671A | | | | |
| JP7294487A | | | | |
| JP8007832A | | | | |
| JP8178899A | | | | |
| JP10038739A | | | | |
| JP10213509A | | | | |
| JP11236666A | | | | |
| JP11273513A | | | | |
| JP2000109973A | | | | |
| JP2000329634A | | | | |
| JP2001215163A | | | | |
| JP2002329475A | | | | |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
