Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
QUALITY CONTROL METHOD OF GRINDING WHEEL IN GRINDING WORK
Document Type and Number:
Japanese Patent JP2011230232
Kind Code:
A
Abstract:

To provide a quality control method of a grinding wheel in grinding work, capable of detecting a grinding mark caused by a fixed abrasive grain of a large grain size.

While determining the reference surface area of silicon powder in silicon sludge generated when grinding a grinding object by a reference grinding wheel, the measured surface area of the silicon powder in the silicon sludge generated when grinding the same grinding object as the grinding object by using the grinding wheel, is determined. Afterwards, since quality of the grinding wheel is detected from a difference between the measured surface area and the reference surface area, the grinding mark caused by the fixed abrasive grain of a large diameter can be easily detected from a change in the surface area of the silicon powder of the silicon sludge.


Inventors:
HIRANO KATSUYA
MORITA ETSURO
Application Number:
JP2010102911A
Publication Date:
November 17, 2011
Filing Date:
April 28, 2010
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SUMCO CORP
International Classes:
B24B7/22; H01L21/304
Attorney, Agent or Firm:
Ichiro Abe