Title:
シリコン単結晶引上げ用石英ガラスルツボ
Document Type and Number:
Japanese Patent JP4526034
Kind Code:
B2
Abstract:
A quartz glass crucible for use in pulling up a silicon single crystal, wherein it has, at least in the curved portion thereof, a three-layer structure comprising a transparent inner layer being composed of a synthetic quartz glass and having a low Al concentration, a transparent or nontransparent intermediate layer being composed of a natural quartz glass or a mixture of natural and synthetic quartz glasses and having a high A1 concentration, and a nontransparent outer layer being composed of a natural quartz glass and having an Al concentration higher than that of the intermediate layer. The quartz glass crucible is reduced in the deformation of the transparent inner layer, and allows the suppression of the change in the amount of dissolution of the quartz glass crucible associated with the pull-up of a single crystal and the achievement of the uniform oxygen concentration in the longitudinal direction of a single crystal.
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Inventors:
Yasuo Ohama
Takayuki Tokawa
Mizuo Shigeo
Takayuki Tokawa
Mizuo Shigeo
Application Number:
JP2005506471A
Publication Date:
August 18, 2010
Filing Date:
May 21, 2004
Export Citation:
Assignee:
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
C30B29/06; C03B19/09; C03B20/00; C30B15/10
Domestic Patent References:
| JP2003095678A | 2003-04-03 | |||
| JP2000247778A | 2000-09-12 | |||
| JP2002284596A | 2002-10-03 |
Attorney, Agent or Firm:
Heihachi Hattori