Title:
RADIATION DETECTION ELEMENT AND MANUFACTURING METHOD THEREOF, RADIATION DETECTION MODULE, AND RADIATION IMAGE DIAGNOSTIC DEVICE
Document Type and Number:
Japanese Patent JP2012098175
Kind Code:
A
Abstract:
To provide a radiation detection element with an improved resolution property and a manufacturing method thereof, a radiation detection module, and a radiation image diagnostic device.
A vapor deposition material heated and vaporized is guided to a vapor deposition container (plate) 41 having plural discharge holes 41A1 to 41An, 41B1 to 41Bm and the vapor deposition material is discharged from the plural discharge holes 41A1 to 41An, 41B1 to 41Bm for vapor deposition to a sensor substrate 11, thereby reducing variation in growth and distribution of columnar crystal constituting a scintillator layer.
Inventors:
YOKOZAWA NOBUYUKI
KAWANISHI MITSUHIRO
IGARASHI TAKAHIRO
KUSAYAMA IKUMI
KAWANISHI MITSUHIRO
IGARASHI TAKAHIRO
KUSAYAMA IKUMI
Application Number:
JP2010246506A
Publication Date:
May 24, 2012
Filing Date:
November 02, 2010
Export Citation:
Assignee:
SONY CORP
International Classes:
G21K4/00; C23C14/24; G01T1/20; G01T1/202
Foreign References:
| US0009005A | 1852-06-08 |
Attorney, Agent or Firm:
Yoichiro Fujishima
Yasushi Santanzaki
Masao Hasebe
Takaaki Tanaami
Yasushi Santanzaki
Masao Hasebe
Takaaki Tanaami