Title:
感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP5728883
Kind Code:
B2
Inventors:
Tomohiro Kakizawa
Yasuhiko Matsuda
Yusuke Asano
Mitsuo Sato
Kimoto
Ryuichi Serizawa
Takeshi Ishii
Yasuhiko Matsuda
Yusuke Asano
Mitsuo Sato
Kimoto
Ryuichi Serizawa
Takeshi Ishii
Application Number:
JP2010235987A
Publication Date:
June 03, 2015
Filing Date:
October 20, 2010
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/039
Domestic Patent References:
| JP2008260931A | ||||
| JP2007116664A1 | ||||
| JP2009098687A | ||||
| JP2010002870A | ||||
| JP2011002805A | ||||
| JP2010230891A | ||||
| JP2009197207A | ||||
| JP2009175363A | ||||
| JP2009080338A | ||||
| JP2008107806A |
Attorney, Agent or Firm:
Hajime Amano