To provide a raw material feeding device which feeds a gaseous raw material sublimated from a solid raw material and inhibits particles from forming; and to provide a film-forming apparatus using the raw-material-feeding device.
The raw-material-feeding device which feeds the gaseous raw material sublimated from the solid raw material comprises: a raw material container for retaining the solid raw material in the inner part; a first heating means placed in a first side of the raw material container; a second heating means placed in a second side of the raw material container; a first temperature control means for performing the first treatment to control the first heating means and the second heating means so that a temperature in the first side becomes higher than that in the second side, in order to make the solid raw material sublimate in the first side; and a second temperature control means for performing the second treatment to control the first heating means and the second heating means so that the temperature of the second side becomes higher than that of the first side, in order to make the solid raw material sublimate in the second side.
KOUNO YUMIKO
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