To provide a relative teaching method for a conveyance robot capable of conducting quick relative teaching with high reliability.

When a conveyance operation is taught to the conveyance robot 1 for conveying a substrate S among a plurality of processing chambers L, P1 and P3 provided in a turning direction by turning and stretching a robot hand 13 while carrying the substrate in the same plane, coordinate data serving as reference when stretching for any one of the processing chambers is taught, and coordinate data serving as reference when stretching for the other processing chambers is taught based on the former coordinate data. When the coordinate data for one processing chamber is taught, its stretching orbit data is obtained. If stretching strokes of the conveyance robot differ between one processing chamber and the other processing chamber when the coordinate data for the other processing chambers is taught, the position of the robot hand is corrected from the stretching orbit data.

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