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Title:
RELIABILITY EVALUATION OF WIRING
Document Type and Number:
Japanese Patent JPH0697254
Kind Code:
A
Abstract:

PURPOSE: To provide a method of evaluating the service durability of a wiring independent of its length by a method wherein a specimen is subjected to a conductivity test as different currents A and B are successively applied to it, and the service life of a specimen is defined as a length of time where a current A is kept flowing through the specimen till its electric resistance increases by over a certain rate as compared with that at a test starting time.

CONSTITUTION: Current applying terminals 3 and 4 and voltage measuring terminals 5 and 6 are provided to both the ends of a wiring specimen 2 formed on an Si board 1. At a conductivity life evaluating test, the specimen 2 is placed in a thermostatic chamber 7 together with the Si board 1, and a current is applied to the wiring specimen 2 through the terminals 3 and 4 from a programmable power supply 8 to start a test. At the same time, a voltage between the voltage measuring terminals 5 and 6 is measured by a direct current voltmeter 9, a time required for making the electrical resistance of the wiring specimen 2 increased by over a certain rate is obtained, and a length of time where a current A out of two different, currents A and B (A<B) is kept flowing through the specimen 2 is calculated as the service life of the specimen 2.


Inventors:
FUKADA SHINICHI
KUDO KAZUE
MINEMURA TETSUO
Application Number:
JP24299292A
Publication Date:
April 08, 1994
Filing Date:
September 11, 1992
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G01R31/02; H01L21/3205; H01L21/66; H01L23/52; (IPC1-7): H01L21/66; G01R31/02; H01L21/3205
Attorney, Agent or Firm:
Ogawa Katsuo



 
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