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Title:
RESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2001013679
Kind Code:
A
Abstract:

To obtain an alkali-developable resist composition having shock and heat resistances and reliability of electrical insulation and excellent in work efficiency by blending a curable composition based on an alkali-soluble acrylic and/or methacrylic [(meth)acrylic] compound with a specified crosslinking elastic polymer and an enhancer which enhances adhesion to copper.

A curable composition based on a (meth)acrylic compound is blended with a carboxyl-containing fine particulate crosslinking elastic polymer and an enhancer which enhaces adhesion to copper to obtain the objective resist composition. The curable composition preferably comprises (1) an alkali- soluble (meth)acrylic compound having a carboxylic group, (2) a polymerizable compound having one or more C=C unsaturated double bonds, (3) a UV polymerization initiator for the polymerizable compound (2), (4) a sensitizer for UV polymerization and (5) a heat polymerization initiator for the polymerizable compound (2), and is a resist composition made to have UV curability.


Inventors:
HARUTA YOICHI
Application Number:
JP30354699A
Publication Date:
January 19, 2001
Filing Date:
October 26, 1999
Export Citation:
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Assignee:
TOAGOSEI CO LTD
International Classes:
G03F7/004; C08F2/44; C08F2/48; C08F290/12; C08F290/14; C08K5/3475; C08K5/521; C08L33/06; C08L63/10; C08L101/00; G03F7/027; G03F7/028; G03F7/033; G03F7/037; G03F7/038; G03F7/085; (IPC1-7): G03F7/004; C08F2/44; C08F2/48; C08F290/12; C08F290/14; C08K5/3475; C08K5/521; C08L33/06; C08L63/10; C08L101/00; G03F7/027; G03F7/028; G03F7/033; G03F7/037; G03F7/038; G03F7/085
Domestic Patent References:
JPH10182758A1998-07-07
JPH09137109A1997-05-27
JPH0233148A1990-02-02
JPH02113252A1990-04-25
JPS61166541A1986-07-28
JPS5762047A1982-04-14
JPS57145392A1982-09-08
JPH11240930A1999-09-07