レジスト組成物 - Sumitomo Chemical Co., Ltd.

Title:

レジスト組成物

Document Type and Number:

Japanese Patent JP6883954

Kind Code:

B2

Abstract:

wherein R1 represents a hydrogen atom, a halogen atom or a C1 to C6 alkyl group that may have a halogen atom, L1 represents a single bond or *-L2-CO—O-(L3-CO—O)g— where * represents a binding position to an oxygen atom, L2 and L3 independently represent a C1 to C12 divalent hydrocarbon group, g represents 0 or 1, and R3 represents a C1 to C12 liner or branched alkyl group except for a tertiary alkyl group.

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Inventors:

Takayuki Miyagawa
Kae Araki
Koji Ichikawa

Application Number:

JP2016122056A

Publication Date:

June 09, 2021

Filing Date:

June 20, 2016

Export Citation:

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