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Title:
RESIST PATTERN FORMING METHOD
Document Type and Number:
Japanese Patent JP2008116910
Kind Code:
A
Abstract:

To provide a resist pattern forming method in which exposure of a solder resist material can be performed in a short time and laser exposure can be performed using the same solder resist material as a conventional one.

An ultraviolet sensitive solder resist film 7 surface-covered with a cover film 6 is formed on a printed wiring board 3, a resist film 8 which blocks ultraviolet light and is sensitive to visible light is formed above the solder resist film 7, exposed to a resist pattern 11 by exposure with visible light laser 10, and developed with water to form a mask pattern comprising the resist pattern 11 with a hardened film of the resist film 8, and then the solder resist film 7 is exposed to a solder resist pattern 5 with ultraviolet light through the mask pattern as a mask and developed with a weak alkali developing solution to form a solder resist pattern 5 comprising a hardened film of the solder resist film 7 on the printed wiring board 3.


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Inventors:
KITAMURA KAZUNORI
SATO KIYOSHI
INOUE EIICHI
Application Number:
JP2007201223A
Publication Date:
May 22, 2008
Filing Date:
August 01, 2007
Export Citation:
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Assignee:
SANEI KAGAKU KK
International Classes:
G03F7/26; G03F7/004; G03F7/027; G03F7/20; G03F7/32; H05K3/06; H05K3/18; H05K3/28
Domestic Patent References:
JP2001201870A2001-07-27
JP2001242618A2001-09-07
Attorney, Agent or Firm:
Hiroyuki Kurihara
Muranaka