Title:
ROTARY POSITIONING DEVICE
Document Type and Number:
Japanese Patent JP3540634
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the accuracy of positioning a positioned object.
SOLUTION: A rotary positioning device is provided with a rotating displacement table 26 mounted and held to a rotating part of a rotating device through a base 35 so as to hold a positioned object 25 while rotating together with the rotating part and to minutely displace the positioned object 25 in a parallel direction to a rotating shaft of the rotating part; a transmitter-receiver that can input/output, on the fixed side, electric power and signals required to drive the rotating displacement table 26 in the rotating state for minute displacement; and a controller for controlling the displacement of the rotating positioned object 25 through the transmitter-receiver. The rotating displacement table 26 for positioning the displacement and inclination of the positioned object 26 is mounted on the rotating part of the rotating device through the base 35 heightened in rigidity by radial ribs 71 and a circumferential rib 72. A driving shaft of the rotating displacement table 26 and the rotating shaft of the rotating part are made to coincide with each other, and an oscillation error depending on the angle of rotation is suppressed to eliminate an error generated by an offset between the driving shaft and the rotating shaft, thus improving the accuracy of positioning the positioned object.
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Inventors:
Osamu Hasegawa
Shin Asano
Takeshi Tsuno
Takayuki Goto
Shin Asano
Takeshi Tsuno
Takayuki Goto
Application Number:
JP32644798A
Publication Date:
July 07, 2004
Filing Date:
November 17, 1998
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
B23Q15/22; B23Q1/00; B23Q1/30; B23Q1/34; B23Q1/52; B23Q1/64; B24B47/12; B24B49/18; G01B5/24; G01B21/22; G05B19/18; G05D3/00; G12B5/00; H01L21/68; (IPC1-7): G05D3/00; B23Q15/22; G05B19/18; H01L21/68
Domestic Patent References:
| JP7319549A | ||||
| JP9184517A |
Attorney, Agent or Firm:
Toshiro Mitsuishi
Tadahiro Mitsuishi
Yasuyuki Tanaka
Tadahiro Mitsuishi
Yasuyuki Tanaka