Title:
露光装置における回転同期振れ測定方法および補償描画方法
Document Type and Number:
Japanese Patent JP4515179
Kind Code:
B2
Inventors:
Sugiyama Kenshi
Shoichi Nishikawa
Kazunori Komatsu
Kazuhiro Niizuma
Shoichi Nishikawa
Kazunori Komatsu
Kazuhiro Niizuma
Application Number:
JP2004211410A
Publication Date:
July 28, 2010
Filing Date:
July 20, 2004
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G01B15/00; G01B21/00; G03F7/20; G11B7/26
Domestic Patent References:
| JP11288531A | ||||
| JP2003029421A | ||||
| JP5165222A | ||||
| JP2003272248A | ||||
| JP61227234A |
Attorney, Agent or Firm:
Yanagita Seiji
Go Sakuma
Go Sakuma