To provide a sample analyzer capable of accurately preparing a surface image, based on an electron beam emitted from a sample, by preventing generation of heat or charge-up phenomenon due to the irradiation of the electron beam for a long period at a specified position to be analyzed which is the object of analysis.

This specimen analyzer comprises an electron beam radiating device radiating the electron beam to the prescribed regions of the sample, a first analyzing part detecting a first energy ray, generated from the specimen irradiated with the electron beam and performing the analysis of the specimen, and a second analyzing part for detecting a second energy ray generated from the specimen irradiated with electron beam and performing the analysis of the specimen. Only when the electron beam is emitted to a prescribed position, where a detection part for detecting the second energy ray is involved within the prescribed area of the specimen, the second analyzing part detects the second energy ray generated from the specimen. Furthermore, the second analyzing part accumulates these detection values, and by using these accumulated values, performs the analysis of the specimen.