サファイア基板の平坦化加工装置および平坦化加工方法

Title:

サファイア基板の平坦化加工装置および平坦化加工方法

Document Type and Number:

Japanese Patent JP5877520

Kind Code:

B2

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Inventors:

Hirotaka Kokonoki
Junya Shimizu
Mochimaru retrograde
Satoru Ide
Fumio Kubo

Application Number:

JP2011174463A

Publication Date:

March 08, 2016

Filing Date:

August 10, 2011

Export Citation:

Assignee:

Okamoto Machine Tool Co., Ltd.

International Classes:

H01L21/304; B24B7/00; B24B37/10

Domestic Patent References:

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