Title:
DMD AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3108010
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a DMD (movable mirror device) which has an address scanning circuit, decreases the damage of a substrate and enhances the reflection efficiency of movable mirrors and a process for producing such device.
SOLUTION: This process has production stages for producing the first and second movable mirrors 50, 70 on a substrate 10, producing first and second posts 40, 60, etc., separately producing an address scanning circuit SRAM on another substrate and finally joining the substrate 10 and the another substrate to each other. The second post 60 is formed perpendicular by sputtering after the second movable mirror is formed.
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Inventors:
Choi
Application Number:
JP10048796A
Publication Date:
November 13, 2000
Filing Date:
April 22, 1996
Export Citation:
Assignee:
Samsung Electronics Co.,Ltd.
International Classes:
B81B3/00; G02B5/08; G02F1/015; G02B26/08; H04N5/74; (IPC1-7): G02B26/08; H04N5/74
Other References:
【文献】米国特許5212582(US,A)
Attorney, Agent or Firm:
Tadahiko Ito (1 outside)
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