Title:
SCANNING PROBE MICROSCOPE
Document Type and Number:
Japanese Patent JP2016023952
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a scanning microscope capable of performing stable measurement even when a mode is switched during scanning of a sample.SOLUTION: The scanning probe microscope has a signal conversion unit 24 which is arranged between a feedback control part 15 and a displacement amount detection part 9, and which includes: an offset circuit 11 for making a reference value for keeping a distance between a cantilever and a sample constant when a tapping mode is selected, coincide with a reference value for keeping the distance between the cantilever and the sample constant when a contact mode is selected; a branching point 27 where a signal outputted from the displacement amount detection part 9 is divided into a first signal and a second signal; a first signal path 26 through which the first signal passes; a second signal path 28 through which the second signal passes; a switch 12 for connecting the first signal path 26 to the feedback control part 15 when the contact mode is selected, or for connecting the second signal path 28 to the feedback control part 15 when the tapping mode is selected; and a DC conversion part 14, arranged in the second signal path 28, for converting an AC signal into a signal proportional to an amplitude of the AC signal.SELECTED DRAWING: Figure 1
Inventors:
NAGAO MASASHI
Application Number:
JP2014146009A
Publication Date:
February 08, 2016
Filing Date:
July 16, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
G01Q60/34; G01B5/20; G01Q60/36
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa