Title:
SCANNING PROXIMITY FIELD OPTICAL MICROSCOPE
Document Type and Number:
Japanese Patent JP2002022640
Kind Code:
A
Abstract:
To provide a scanning proximity field optical microscope improved to obtain an AFM image along with an SNOM image.
A scanning optical microscope comprising means for irradiating a specimen with light, a granular probe for scanning the specimen while keeping a constant distance therefrom, and means for detecting the intensity of proximity field light from the specimen is further provided with means for detecting the position of the granular probe by detecting the proximity field light therefrom.
More Like This:
Inventors:
YAMAGUCHI MITSUSHIRO
Application Number:
JP2000205178A
Publication Date:
January 23, 2002
Filing Date:
July 06, 2000
Export Citation:
Assignee:
OLYMPUS OPTICAL CO
International Classes:
G01B11/00; G01Q20/02; G01Q60/06; G01Q60/18; G01Q60/22; G01Q60/24; G02B21/00; (IPC1-7): G01N13/14; G01B11/00; G02B21/00; G12B21/06
Attorney, Agent or Firm:
Takehiko Suzue (3 outside)