To observe a spectrum while confirming a field of view without being affected by a sample change or drift or the like, and obtain a scanning transmission electronic image even during mapping of a spectrum.
The scanning transmission electronic image observing device for the electron microscope provided with the energy filter irradiating an electron beam on a sample to scan it and carrying out energy spectral diffraction of the electron beam transmitting through the sample is provided with a two-dimensional detecting means 1 for observing the spectrum, an electronic image detecting means 2 for observing the scanning transmission electronic image, and a deflecting means 3 for selectively distributing the electron beam to each of the two-dimensional detecting means 1 and the electronic image detecting means 2. By the deflecting means 3, the electron beam is distributed to the two-dimensional detecting means 1 every reverse scanning between each line for acquiring an image by the electronic image detecting means 2, or the electron beam is distributed to the electronic image detecting means 2 every one line for acquiring a spectrum by the two-dimensional detecting means 1.
Hirukawa Masanobu
Hiroki Shirai
Norihiko Uchida
Hideo Sugai
Kenji Aoki
Hiroshi Nagisawa
Akira Yonezawa
Tsutomu Iitaka