PURPOSE: To improve observing accuracy of a surface of a sample by arranging an electric field/magnetic field imparting means between an electron optical system and the sample.

CONSTITUTION: An electron beam 11 generated from a beam generating source 10 is radiated to the surface of a sample 17 through an electron optics system 12 containing a leader electrode 13, an accelerating electrode 14, a convergent lens 15, an objective lens 16 and the like. A reflected electron from the surface of the sample 17 is detected by detectors 18, and electric signals from the detectors 18 are sent to a display device 21 through an amplifier 19 and a signal processing circuit 20, and an image is displayed. In order to correct an incident angle of the electron beam 11 radiated to the sample 17, an electric field/magnetic field imparting means 22 to generate an optional size electric field or magnetic field is arranged between the electron optical system 12 and the sample 17.