SEAL MEMBER WITH FILTER AND TURBO-MOLECULAR PUMP THEREWITH

Japanese Patent JP3804721

B2

PROBLEM TO BE SOLVED: To simplify the structure of a connection section between devices to be evacuated by arranging a seal ring made of an elastic body having the thickness larger than the thickness of a ring member on the outer periphery of the ring member, and integrally fitting a filter preventing a solid from passing through the inside to the ring member.
SOLUTION: A seal member 70 with a filter is arranged on the exhaust port of a turbo-molecular pump. The seal member 70 with the filter is constituted of an inside ring 72 integrally fitted with a meshy filter 78 to cover the inside opening section, an outside ring 74, and an elastic ring 76 pinched between them. The thickness (r) of the elastic ring 76 is set larger than the thickness (t) of the inside ring 72 and the outside ring 74. When an intake port and the exhaust port of a device are fixed by bolts across the elastic ring 76, the elastic ring 76 is collapsed into close contact with the faces of the intake port and exhaust port, and airtightness is secured. No filter support ring is required to be provided at the intake port, and the structure is simplified.

Atsushi Shiokawa
Yutaka Hirakawa

JP5298398A

August 02, 2006

February 18, 1998

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Ebara Corporation

F04D19/04; F16C32/04; (IPC1-7): F04D19/04; F16C32/04

JP6048806U
JP60028298U
JP3002238U
JP55068750U
JP57212395A
JP2091288U
JP1113191U
JP48039557U
JP62166369U
JP4116694U

Isamu Watanabe
Shintaro Hotta
Susumu Ohata

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