To provide a semi-conductor acceleration sensor that can be easily controlled in the space of a cavity between an upper stopper and a dead weight part, and reduced in manufacturing cost.
This sensor is provided with the dead weight part 13, a deflection part 12 of which the one end is connected to the dead weight part 13 to be deflected by imparting an acceleration onto the weight 13, a diffusion gage resistance 14 formed in the deflection part 12 to convert the acceleration into an electric signal based on the deflection of the deflection part 12, a support part 11 provided with a plurality of electrode pads 22 connected to a terminal on one face side to support the other end of the deflection part 12 while surrounding an outer circumferential edge of the dead weight part 13 with the space, and the upper stopper 31 provided respectively with an upper abutting face brought into contact with the weight 13, and an upper fixing face fixed to a one-face side joining part 23 formed on one-face side of the support part. In the upper stopper 31, the upper fixing part 31b is fixed to a one-face side joining part 23 comprising a material same to that for the electrode pads 22, and the upper fixing part 31b is formed flush with the upper abutting face 31a.
KATAOKA KAZUSHI
SAIJO TAKASHI
EDA KAZUO
SAITO MAKOTO
