To provide a semi-conductor acceleration sensor that can be easily controlled in the space of a cavity between an upper stopper and a dead weight part, and reduced in manufacturing cost.
The upper stopper 31 and a lower stopper 32 arranged opposedly on both faces of a support part 11 are provided to support the dead weight part 13 overhangingly by a deflection part 12 of the support part 11 and to limit an oscillation range of the dead weight part 13. The lower stopper 32 is supported onto the other side face of the support part 11 to have the cavity with respect to the dead weight part 13, the upper stopper 31 is formed plane- likely to be supported onto the other face of the support part 11, the dead weight part 13 is inclined to a direction separating from the upper stopper 31 with respect to one face of the support part 11 to be supported to the support part 11, and gaps 41, 42 are provided respectively between the upper and lower stopper 31, 32 and the dead weight 13.
| JP2000088877 | ACCELERATION SENSOR DEVICE |
| JPH05119059 | MANUFACTURE OF SEMICONDUCTOR ACCELERATION SENSOR |
| JPH1164369 | SEMICONDUCTOR SENSOR |
KATAOKA KAZUSHI
SAIJO TAKASHI
EDA KAZUO
SAITO MAKOTO
Next Patent: SEMI-CONDUCTOR ACCELERATION SENSOR, AND MANUFACTURING METHOD THEREFOR