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Title:
SEMICONDUCTOR DEVICE AND ITS FABRICATING METHOD
Document Type and Number:
Japanese Patent JP2002118177
Kind Code:
A
Abstract:

To provide a high integration semiconductor device in which breakdown strength of a high breakdown strength PMOS transistor is ensured.

The semiconductor device comprises an N type transistor 4 having a first gate 18, an N type lightly doped diffusion layer 36 formed around the first gate, an N type heavily doped diffusion layer 6 formed around the N type lightly doped diffusion layer, and first gate sidewalls 29, 47 and 82 formed around the first gate, and a P type transistor 3 having a second gate 13, a P type lightly doped diffusion layer 35 formed around the second gate, a P type heavily doped diffusion layer 11 formed around the P type lightly doped diffusion layer, and second gate sidewalls 10, 29 and 82 formed around the gate wherein the P type lightly doped diffusion layer extends farther downward of the second gate than the N type lightly doped diffusion layer extending downward of the first gate.


Inventors:
WATABE HIROSHI
NARUGE KIYOMI
MASUDA KAZUNORI
Application Number:
JP2000310155A
Publication Date:
April 19, 2002
Filing Date:
October 11, 2000
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L21/336; H01L21/8234; H01L21/8238; H01L21/8247; H01L27/092; H01L27/10; H01L27/105; H01L27/115; H01L29/78; H01L29/788; H01L29/792; (IPC1-7): H01L21/8238; H01L27/092; H01L21/8247; H01L27/115; H01L27/10; H01L29/78; H01L21/336; H01L29/788; H01L29/792
Attorney, Agent or Firm:
Togawa Hideaki