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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2013069816
Kind Code:
A
Abstract:

To provide a semiconductor device which can achieve low resistance by a thinned silicon carbide substrate, and a manufacturing method thereof.

According to one embodiment, a semiconductor device comprises: a silicon carbide substrate; a semiconductor layer; an insulation film; a reinforcement substrate; a first electrode; and a second electrode. The semiconductor layer is provided on a second surface of the silicon carbide substrate and has an element region and a peripheral region closer to an end side than to the element region. The insulation film is provided on a surface of the peripheral region of the semiconductor layer. The reinforcement substrate is provided on the insulation film in the peripheral region. The first electrode is provided in contact with a first surface of the silicon carbide substrate. The second electrode is provided in contact with a surface of the element region.


Inventors:
SUGIYAMA HITOSHI
Application Number:
JP2011206633A
Publication Date:
April 18, 2013
Filing Date:
September 21, 2011
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L29/47; H01L21/02; H01L21/329; H01L29/872
Attorney, Agent or Firm:
Masahiko Hinataji